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Continue to ChatSelf-limiting low-temperature growth of crystalline AlN thin films by plasma-enhanced atomic layer deposition - https://avesis.marmara.edu.tr/yayin/fdab1623-07ad-4c18-a5f3-1d5760475cc8/self-limiting-low-temperature-growth-of-crystalline-aln-thin-films-by-plasma-enhanced-atomic-layer-deposition